LIQUID WAX
LIQUID WAX is used for the process of mounting by auto wafer mounting equipment.
SKYLIQUID Series
SKYLIQUID series, coated in automatic mounter or by spinner, can attain super flat mounting which makes high precision wafers. Can be cleaned by SC-1 or our high pure cleaning agent, KILALACLEAN, which reduces particles and haze and makes ultra clean wafers.
AQUALIQUID Series
WA series is water-soluble liquid wax which is liquefied by organic solvent. Can be mounted at lower temperature. JC series is environmental-friendly wax as the solvent is water. It can be coated on a polishing plate. Dewaxed by alkali detergents such as our high-purity "KILALA CLEAN".
ASTROLIQUID Series
ASTROLIQUID is developed for backside grinding of patterned semiconductor device wafers. The thickness of coating film can be adjusted by selecting the wax concentration. It has excellent coatability, adhesion, and workability on patterned surfaces. After processing, dewaxing is easy with a solvent such as IPA.
SPACELIQUID Series
SPACELIQUID is newly developed with high softening point and chemical resistant characterictics for mounting patterned wafers of back grindings and other processes. Wax layer thickness is about 5-10 times of SKYLIQUID so that protects patterned surface. Easy dewax by solvents.
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